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TCU

Thermal Control Unit

Patent:
TW-M357317
CN-ZL 2012 2 0075732.3

OVERVIEW

Ability
Providing accurate temperature and humidity control solution for LCD、Wafer、Packaging industry. Ensuring the good yield and efficiency in aligner, development, and coating process.
Characteristics
Cleanliness:ISO Class 1
Temperature accuracy range: ±0.1℃ ~ ±0.01℃
Humidity accuracy range:±2%RH ~ ±1%RH
Built-in temp.& humidity curve data
Machine alarm
Remote-monitor
Auto protection
Applications
?Industry : Semiconductor / Flat Panel Display (FPD) Precision Machining / Precision Measuring / Academic Research
?Supply Chain : Panel Manufacturing / Color filter Packaging testing / Package / Wafer Manufacturing
?Application : RGB Photoresist Coating / Aligner Development / Lens lapping / Laser Machining / Geometric dimensions measuring
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