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TAU

Thermal AMC Unit

Patent:
TW-M357317
CN-ZL 2012 2 0075732.3

OVERVIEW

Ability
Prevent aligner lens hazing in order to extend the durable life of lens
Prolong exposure LAMP time
Raising product yield rate
Protect the inner component of machine from the chemical pollutant
Characteristics
Cleanliness:ISO Class 4
Temperature accuracy range:±0.5℃ ~±0.3℃
Humidity accuracy range :±5%RH ~ ±3%RH
AMC removal:>80% in Main AMC
Built-in temp.& humidity record
Machine alarm
Remote-monitor
Auto protection
Applications
Industry : Semiconductor / Flat Panel Display (FPD)
Supply Chain : Panel Manufacturing / Color filter / WaferPackage
Application : RGB Photoresist Coating / Aligner / Development / Prevent Lens Hazing
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