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Inline AMC Monitoring

Inline continuous chemical monitoring

OVERVIEW

Ability
Inline continuous chemical monitoring solution for semi-conductor foundry factory. Optimize manufactured cost and yield rate. Database query and remote control improve.
Characteristics
Over 1000 organic compounds、acid and base gases detected
Detection limit of ppbv level
1 data per 5 minutes
40 sampling areas analyzed by single unit system
200m sampling length
Automatic storage abnormal samples
SEMI S2 Certification
Applications
?Industry : Semiconductor / Optoelectronic
?Supply Chain : Wafer foundry / FabPanel manufacturing Fab / Package Testing / Wafer storage
?Process : Litho / Etch / CVD / Wafer stocker / Clean room environment
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