Provide the cleanliness control for the production environment.
|Provide the cleanliness control for the production environment, using single-split type in order to prevent the production equipment are affected by the vibration.|
|Cleanliness : ISO Class 1|
|Alarm feedback : Alarm Information network about AFU system and processing equipment|
|Cleanliness requirement for the production environment|
|?Manufacture : Semiconductor / LCD / IC Packaging / Traditional industry|
|?Cleanliness environment : Pharmaceutical factory / Biotechnology / Hospital / Operation room / Hospital wards|